Synthesis оf Optoelectronic System for Control оf Microelectronic Structures
Development of optoelectronic systems for registration of structuring element images demands improvement of the equipment for control of sizes and a form of microelectronic structures in accordance with design data and absence of introduced defects and impurities. For synthesis of these systems it i...
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| Format: | Article |
| Language: | Russian |
| Published: |
Belarusian National Technical University
2014-02-01
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| Series: | Наука и техника |
| Online Access: | https://sat.bntu.by/jour/article/view/94 |
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