Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
Abstract In this study, a controllable mass‒frequency tuning method is presented using the etching of rib structures on a single-crystal PZT membrane. The rib structures were optimized to reduce the membrane mass while maintaining the stiffness; therefore, the center frequency could be increased to...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-11-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00767-5 |
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