Enhanced UVC Responsivity of Heteroepitaxial α-Ga<sub>2</sub>O<sub>3</sub> Photodetector with Ultra-Thin HfO<sub>2</sub> Interlayer

Enhanced UVC Responsivity of Heteroepitaxial α-Ga<sub>2</sub>O<sub>3</sub> Photodetector with Ultra-Thin HfO<sub>2</sub> Interlayer

In this study, the influence of HfO<sub>2</sub> interlayer thickness on the performance of heteroepitaxial α-Ga<sub>2</sub>O<sub>3</sub> layer-based metal–insulator–semiconductor–insulator–metal (MISIM) ultraviolet photodetectors is examined. A thin HfO<sub>...

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Bibliographic Details
Main Authors: SiSung Yoon, SeungYoon Oh, GyuHyung Lee, YongKi Kim, SunJae Kim, Ji-Hyeon Park, MyungHun Shin, Dae-Woo Jeon, GeonWook Yoo
Format: Article
Language:English
Published: MDPI AG 2025-07-01
Series:Micromachines
Subjects:
α-Ga<sub>2</sub>O<sub>3</sub>
UVC photodetectors
hafnium oxide
metal–semiconductor–metal
responsivity
Online Access:https://www.mdpi.com/2072-666X/16/7/836
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https://www.mdpi.com/2072-666X/16/7/836

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