Learning cleanroom microfabrication operations in virtual reality – An immersive and guided learning experience

Learning cleanroom microfabrication operations in virtual reality – An immersive and guided learning experience

This paper details the design and development of an immersive and self-guided Virtual Reality training system (iSGVRTS) for learning cleanroom microfabrication operations, with a specific emphasis on the photolithography process, within a college-level semiconductor laboratory curriculum. It present...

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Bibliographic Details
Main Authors: Fang Wang, Xinhao Xu, Shangman Li, Weiyu Feng, Mahmoud Almasri
Format: Article
Language:English
Published: Elsevier 2024-12-01
Series:Computers & Education: X Reality
Subjects:
Virtual reality
Microfabrication
Immersive
Learning
Education
Semiconductor
Online Access:http://www.sciencedirect.com/science/article/pii/S2949678024000230
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