Learning cleanroom microfabrication operations in virtual reality – An immersive and guided learning experience
This paper details the design and development of an immersive and self-guided Virtual Reality training system (iSGVRTS) for learning cleanroom microfabrication operations, with a specific emphasis on the photolithography process, within a college-level semiconductor laboratory curriculum. It present...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-12-01
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| Series: | Computers & Education: X Reality |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2949678024000230 |
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