Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films
This study has investigated the effects of different annealing temperatures on the microstructure, chemical composition, phase structure, and piezoelectric properties of ZnO films. The analysis focuses on how annealing temperature influences the oxygen content and the preferred c-axis (002) orientat...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/25/1/242 |
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| author | Ke Deng Zhonghao Liu Hulin Liu Yanxiang Chen Shang Li Shuren Guo Boyu Xiu Xuanpu Dong Huatang Cao |
| author_facet | Ke Deng Zhonghao Liu Hulin Liu Yanxiang Chen Shang Li Shuren Guo Boyu Xiu Xuanpu Dong Huatang Cao |
| author_sort | Ke Deng |
| collection | DOAJ |
| description | This study has investigated the effects of different annealing temperatures on the microstructure, chemical composition, phase structure, and piezoelectric properties of ZnO films. The analysis focuses on how annealing temperature influences the oxygen content and the preferred c-axis (002) orientation of the films. It was found that annealing significantly increases the grain size and optimizes the columnar crystal structure, though excessive high-temperature annealing leads to structural degradation. This behavior is likely related to changes in oxygen content at different annealing temperatures. High resolution transmission electron microscopy (HR-TEM) reveals that the films exhibit high-resolution lattice stripes, confirming their high crystallinity. Although the films exhibit growth in multiple orientations, the c-axis (002) orientation remains the predominant crystallographic growth. Further piezoelectric property analysis demonstrates that the ZnO films annealed at 400 °C exhibit enhanced piezoelectric performance and stable linear piezoelectric behavior. These findings offer valuable support for optimizing the piezoelectric properties of ZnO films and their applications in piezoelectric sensors. |
| format | Article |
| id | doaj-art-fab5b9e8d01041fd99e1514e543eb84e |
| institution | Kabale University |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj-art-fab5b9e8d01041fd99e1514e543eb84e2025-01-10T13:21:20ZengMDPI AGSensors1424-82202025-01-0125124210.3390/s25010242Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO FilmsKe Deng0Zhonghao Liu1Hulin Liu2Yanxiang Chen3Shang Li4Shuren Guo5Boyu Xiu6Xuanpu Dong7Huatang Cao8Zhuzhou Hanjie Aviation Science & Technology Co., Ltd., Zhuzhou 412002, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaZhuzhou Hanjie Aviation Science & Technology Co., Ltd., Zhuzhou 412002, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaShanghai Research Institute of Materials Co., Ltd., Shanghai 200437, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaState Key Laboratory of Materials Processing and Die & Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, ChinaThis study has investigated the effects of different annealing temperatures on the microstructure, chemical composition, phase structure, and piezoelectric properties of ZnO films. The analysis focuses on how annealing temperature influences the oxygen content and the preferred c-axis (002) orientation of the films. It was found that annealing significantly increases the grain size and optimizes the columnar crystal structure, though excessive high-temperature annealing leads to structural degradation. This behavior is likely related to changes in oxygen content at different annealing temperatures. High resolution transmission electron microscopy (HR-TEM) reveals that the films exhibit high-resolution lattice stripes, confirming their high crystallinity. Although the films exhibit growth in multiple orientations, the c-axis (002) orientation remains the predominant crystallographic growth. Further piezoelectric property analysis demonstrates that the ZnO films annealed at 400 °C exhibit enhanced piezoelectric performance and stable linear piezoelectric behavior. These findings offer valuable support for optimizing the piezoelectric properties of ZnO films and their applications in piezoelectric sensors.https://www.mdpi.com/1424-8220/25/1/242ZnO filmsannealing treatmentmicrostructurepiezoelectricsensors |
| spellingShingle | Ke Deng Zhonghao Liu Hulin Liu Yanxiang Chen Shang Li Shuren Guo Boyu Xiu Xuanpu Dong Huatang Cao Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films Sensors ZnO films annealing treatment microstructure piezoelectric sensors |
| title | Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films |
| title_full | Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films |
| title_fullStr | Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films |
| title_full_unstemmed | Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films |
| title_short | Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films |
| title_sort | temperature dependence on microstructure crystallization orientation and piezoelectric properties of zno films |
| topic | ZnO films annealing treatment microstructure piezoelectric sensors |
| url | https://www.mdpi.com/1424-8220/25/1/242 |
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