A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping results to be rarefied and, thus, not suitable to be modeled though the classical Navier-Stokes equation. The simplest way to consider fluid rarefaction is the introduction of a slight modification into its...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Gruppo Italiano Frattura
2012-12-01
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| Series: | Fracture and Structural Integrity |
| Subjects: | |
| Online Access: | https://www.fracturae.com/index.php/fis/article/view/168 |
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