Normally-Off Trench-Gated AlGaN/GaN Current Aperture Vertical Electron Transistor with Double Superjunction

This study proposes an AlGaN/GaN current aperture vertical electron transistor (CAVET) featuring a double superjunction (SJ) to enhance breakdown voltage (BV) and investigates its electrical characteristics via technology computer-aided design (TCAD) Silvaco Atlas simulation. An additional <i>...

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Bibliographic Details
Main Authors: Jong-Uk Kim, Do-Yeon Park, Byeong-Jun Park, Sung-Ho Hahm
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Technologies
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Online Access:https://www.mdpi.com/2227-7080/12/12/262
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Summary:This study proposes an AlGaN/GaN current aperture vertical electron transistor (CAVET) featuring a double superjunction (SJ) to enhance breakdown voltage (BV) and investigates its electrical characteristics via technology computer-aided design (TCAD) Silvaco Atlas simulation. An additional <i>p</i>-pillar was formed beneath the gate current blocking layer to create a lateral depletion region that provided a high off-state breakdown voltage. To address the tradeoff between the drain current and off-state breakdown voltage, the key design parameters were carefully optimized. The proposed device exhibited a higher off-state breakdown voltage (2933 V) than the device with a single SJ (2786 V), although the specific on-resistance of the proposed method (1.29 mΩ·cm<sup>−2</sup>) was slightly higher than that of the single SJ device (1.17 mΩ·cm<sup>−2</sup>). In addition, the reverse transfer capacitance was improved by 15.6% in the proposed device.
ISSN:2227-7080