Electron beam-based direct writing of nanostructures using a palladium β-ketoesterate complex

Gas-assisted focused electron beam-induced deposition (FEBID) as a direct, minimally invasive 3D nanopatterning tool offers many advantages in making nanostructures with complex shapes and novel compositions for evolving nanotechnological applications. In this work, structures were nanoprinted using...

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Bibliographic Details
Main Authors: Chinmai Sai Jureddy, Krzysztof Maćkosz, Aleksandra Butrymowicz-Kubiak, Iwona B. Szymańska, Patrik Hoffmann, Ivo Utke
Format: Article
Language:English
Published: Beilstein-Institut 2025-04-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.16.41
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