Analysis of CMOS Extended-Gate Field-Effect Transistor With On-Chip Window Based on Uricase/RuO<sub>2</sub> Sensing Film
In this study, the extended-gate field-effect transistor (EGFET) with an on-chip sensing window under the TSMC <inline-formula> <tex-math notation="LaTeX">$0.18{\mu }\text{m}$ </tex-math></inline-formula> 1P6M (one poly and six metals) CMOS process technology was fa...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
|
| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9577229/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|