Mass-spectrometric research of ion sputtering processes at high primary ion energies
The article is devoted to mass-spectrometric investigation of ion sputtering processes in a wide range of primary ion energies. For this purpose a design of the secondary neutral mass-spectrometer is developed, which unlike the traditional devices of the given type is produced on the base of ion imp...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2009-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2009/1/articles/en/jnep_eng_2009_V1_N1_71-91.pdf |
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