Excellent piezoelectric and ferroelectric properties of ScxGa1−xN alloy with high Sc concentration
Alloying wurtzite aluminum nitride and gallium nitride (GaN) with scandium (Sc) enhances the piezoelectric and ferroelectric properties, but increasing the Sc concentration while maintaining the wurtzite phase is a major challenge. We meticulously optimized the sputtering conditions to successfully...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2024-12-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0236507 |
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