Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling
Planar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This pa...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0030477 |
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| Summary: | Planar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This paper presents an inverse hysteresis-coupling hybrid model to account for such hysteresis and couplings. First, a specially designed kinematic chain is adopted to transfer the pose of the end effector into the linear motions at three prismatic joints. Second, an inverse hysteresis-coupling hybrid model is developed to linearize and decouple the system via a multilayer feedforward neural network. A fractional-order PID controller is also integrated to improve the motion accuracy of the overall system. Experimental results demonstrate that the proposed method can accurately control the motion of the end effector with improved accuracy and robustness. |
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| ISSN: | 2589-5540 |