Hysteresis compensation and decoupling control of an XYΘ-type flexure-based mechanism via inverse hysteresis-coupling hybrid modeling
Planar positioning systems are widely utilized in micro and nano applications. The challenges in modeling and control of XYΘ flexure-based mechanisms include hysteresis of the piezoelectric actuators, couplings among the input axes, and coupled linear and angular motions of the end effector. This pa...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0030477 |
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