High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate
Abstract This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resona...
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| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-12-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00841-y |
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