High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate

High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate

Abstract This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resona...

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Bibliographic Details
Main Authors: Fan Xia, Yande Peng, Wei Yue, Mingze Luo, Megan Teng, Chun-Ming Chen, Sedat Pala, Xiaoyang Yu, Yuanzheng Ma, Megha Acharya, Ryuichi Arakawa, Lane W. Martin, Liwei Lin
Format: Article
Language:English
Published: Nature Publishing Group 2024-12-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00841-y
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https://doi.org/10.1038/s41378-024-00841-y

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