High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate
Abstract This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resona...
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2024-12-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00841-y |
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| author | Fan Xia Yande Peng Wei Yue Mingze Luo Megan Teng Chun-Ming Chen Sedat Pala Xiaoyang Yu Yuanzheng Ma Megha Acharya Ryuichi Arakawa Lane W. Martin Liwei Lin |
| author_facet | Fan Xia Yande Peng Wei Yue Mingze Luo Megan Teng Chun-Ming Chen Sedat Pala Xiaoyang Yu Yuanzheng Ma Megha Acharya Ryuichi Arakawa Lane W. Martin Liwei Lin |
| author_sort | Fan Xia |
| collection | DOAJ |
| description | Abstract This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resonant frequency at 106.3 kHz under 4 Vp-p with outstanding characteristics: (1) a large vibration amplitude of 3.74 μm/V, and (2) a high acoustic root mean square (RMS) sound pressure level of 105.5 dB/V at 10 cm, which is 5–10 times higher than those of AlN-based pMUTs at a similar frequency. There are various potential sensing and actuating applications, such as fingerprint sensing, touch point, and gesture recognition. In this work, we present demonstrations in three fields: haptics, loudspeakers, and rangefinders. For haptics, an array of 15 × 15 KNN pMUTs is used as a non-contact actuator to provide a focal pressure of around 160.3 dB RMS SPL at a distance of 15 mm. This represents the highest output pressure achieved by an airborne pMUT for haptic sensation on human palms. When used as a loudspeaker, a single pMUT element with a resonant frequency close to the audible range at 22.8 kHz is characterized. It is shown to be able to generate a uniform acoustic output with an amplitude modulation scheme. In the rangefinder application, pulse-echo measurements using a single pMUT element demonstrate good transceiving results, capable of detecting objects up to 2.82 m away. As such, this new class of high-SPL and low-driving-voltage pMUTs could be further extended to other applications requiring high acoustic pressure and a small form factor. |
| format | Article |
| id | doaj-art-dea8d4839362482b986b42d09c46a675 |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-dea8d4839362482b986b42d09c46a6752024-12-29T12:35:37ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342024-12-0110111310.1038/s41378-024-00841-yHigh sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobateFan Xia0Yande Peng1Wei Yue2Mingze Luo3Megan Teng4Chun-Ming Chen5Sedat Pala6Xiaoyang Yu7Yuanzheng Ma8Megha Acharya9Ryuichi Arakawa10Lane W. Martin11Liwei Lin12Department of Mechanical Engineering, University of CaliforniaDepartment of Mechanical Engineering, University of CaliforniaDepartment of Mechanical Engineering, University of CaliforniaSchool of Electronic Science and Engineering, Southeast UniversityDepartment of Mechanical Engineering, University of CaliforniaDepartment of Mechanical Engineering, University of CaliforniaDepartment of Mechanical Engineering, University of CaliforniaBioengineering and Biomedical Engineering, Xi’an Jiaotong UniversityTsinghua Shenzhen International Graduate School, Tsinghua UniversityDepartment of Materials Science and Engineering, University of CaliforniaScientific Research Laboratory Div., Niterra Co., LtdDepartment of Materials Science and Engineering, University of CaliforniaDepartment of Mechanical Engineering, University of CaliforniaAbstract This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resonant frequency at 106.3 kHz under 4 Vp-p with outstanding characteristics: (1) a large vibration amplitude of 3.74 μm/V, and (2) a high acoustic root mean square (RMS) sound pressure level of 105.5 dB/V at 10 cm, which is 5–10 times higher than those of AlN-based pMUTs at a similar frequency. There are various potential sensing and actuating applications, such as fingerprint sensing, touch point, and gesture recognition. In this work, we present demonstrations in three fields: haptics, loudspeakers, and rangefinders. For haptics, an array of 15 × 15 KNN pMUTs is used as a non-contact actuator to provide a focal pressure of around 160.3 dB RMS SPL at a distance of 15 mm. This represents the highest output pressure achieved by an airborne pMUT for haptic sensation on human palms. When used as a loudspeaker, a single pMUT element with a resonant frequency close to the audible range at 22.8 kHz is characterized. It is shown to be able to generate a uniform acoustic output with an amplitude modulation scheme. In the rangefinder application, pulse-echo measurements using a single pMUT element demonstrate good transceiving results, capable of detecting objects up to 2.82 m away. As such, this new class of high-SPL and low-driving-voltage pMUTs could be further extended to other applications requiring high acoustic pressure and a small form factor.https://doi.org/10.1038/s41378-024-00841-y |
| spellingShingle | Fan Xia Yande Peng Wei Yue Mingze Luo Megan Teng Chun-Ming Chen Sedat Pala Xiaoyang Yu Yuanzheng Ma Megha Acharya Ryuichi Arakawa Lane W. Martin Liwei Lin High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate Microsystems & Nanoengineering |
| title | High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| title_full | High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| title_fullStr | High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| title_full_unstemmed | High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| title_short | High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| title_sort | high sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate |
| url | https://doi.org/10.1038/s41378-024-00841-y |
| work_keys_str_mv | AT fanxia highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT yandepeng highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT weiyue highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT mingzeluo highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT meganteng highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT chunmingchen highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT sedatpala highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT xiaoyangyu highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT yuanzhengma highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT meghaacharya highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT ryuichiarakawa highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT lanewmartin highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate AT liweilin highsoundpressurepiezoelectricmicromachinedultrasonictransducersusingsputteredpotassiumsodiumniobate |