Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition
Saved in:
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2024-12-01
|
| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.4c06606 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1841536753185325056 |
|---|---|
| author | Mario Alberto Hidrogo-Rico Nicola Nedev Paul Horley María Isabel Mendívil Jhonathan Castillo-Saenz Edgar Martínez-Guerra Emilio J. Juarez-Perez Francisco Servando Aguirre-Tostado Arturo Susarrey-Arce Eduardo Martínez-Guerra |
| author_facet | Mario Alberto Hidrogo-Rico Nicola Nedev Paul Horley María Isabel Mendívil Jhonathan Castillo-Saenz Edgar Martínez-Guerra Emilio J. Juarez-Perez Francisco Servando Aguirre-Tostado Arturo Susarrey-Arce Eduardo Martínez-Guerra |
| author_sort | Mario Alberto Hidrogo-Rico |
| collection | DOAJ |
| format | Article |
| id | doaj-art-dc68864366144711b3c2b244f7397679 |
| institution | Kabale University |
| issn | 2470-1343 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj-art-dc68864366144711b3c2b244f73976792025-01-14T11:32:08ZengAmerican Chemical SocietyACS Omega2470-13432024-12-0110142243810.1021/acsomega.4c06606Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer DepositionMario Alberto Hidrogo-Rico0Nicola Nedev1Paul Horley2María Isabel Mendívil3Jhonathan Castillo-Saenz4Edgar Martínez-Guerra5Emilio J. Juarez-Perez6Francisco Servando Aguirre-Tostado7Arturo Susarrey-Arce8Eduardo Martínez-Guerra9Centro de Investigación en Materiales Avanzados, S.C. (CIMAV Subsede Monterrey), Apodaca, Nuevo León, MexicoInstituto de Ingeniería, Universidad Autónoma de Baja California, Mexicali, Baja California, MexicoCentro de Investigación en Materiales Avanzados, S.C. (CIMAV Subsede Monterrey), Apodaca, Nuevo León, MexicoCentro de Investigación en Materiales Avanzados, S.C. (CIMAV Subsede Monterrey), Apodaca, Nuevo León, MexicoInstituto de Ingeniería, Universidad Autónoma de Baja California, Mexicali, Baja California, MexicoFacultad de Ciencias Físico-Matemáticas, Universidad Autónoma de Nuevo León, San Nicolás de los Garza, Nuevo León, MexicoNanostructured Films & Particles Research Group (NFP). Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC Universidad de Zaragoza, Zaragoza, SpainCentro de Investigación en Materiales Avanzados, S.C. (CIMAV Subsede Monterrey), Apodaca, Nuevo León, MexicoMesoscale Chemical Systems, MESA+ Institute, University of Twente, Enschede, The NetherlandsCentro de Investigación en Materiales Avanzados, S.C. (CIMAV Subsede Monterrey), Apodaca, Nuevo León, Mexicohttps://doi.org/10.1021/acsomega.4c06606 |
| spellingShingle | Mario Alberto Hidrogo-Rico Nicola Nedev Paul Horley María Isabel Mendívil Jhonathan Castillo-Saenz Edgar Martínez-Guerra Emilio J. Juarez-Perez Francisco Servando Aguirre-Tostado Arturo Susarrey-Arce Eduardo Martínez-Guerra Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition ACS Omega |
| title | Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition |
| title_full | Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition |
| title_fullStr | Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition |
| title_full_unstemmed | Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition |
| title_short | Tailoring Nickel Oxide Thin Films: Comparative Study of Oxidizing Agents in Thermal and Plasma-Enhanced Atomic Layer Deposition |
| title_sort | tailoring nickel oxide thin films comparative study of oxidizing agents in thermal and plasma enhanced atomic layer deposition |
| url | https://doi.org/10.1021/acsomega.4c06606 |
| work_keys_str_mv | AT marioalbertohidrogorico tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT nicolanedev tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT paulhorley tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT mariaisabelmendivil tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT jhonathancastillosaenz tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT edgarmartinezguerra tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT emiliojjuarezperez tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT franciscoservandoaguirretostado tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT arturosusarreyarce tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition AT eduardomartinezguerra tailoringnickeloxidethinfilmscomparativestudyofoxidizingagentsinthermalandplasmaenhancedatomiclayerdeposition |