Scaling LLSAW filters on engineered LiNbO3-on-SiC wafer for 5G and Wi-Fi 6 wideband applications

Scaling LLSAW filters on engineered LiNbO3-on-SiC wafer for 5G and Wi-Fi 6 wideband applications

Abstract With the surge in fifth-generation (5G) wireless systems and escalating growth of data traffic, the push for higher carrier frequencies with wider bandwidths intensifies. This work reveals the outstanding capabilities of wafer-level longitudinal leaky surface acoustic wave (LLSAW) devices o...

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Bibliographic Details
Main Authors: Peisen Liu, Sulei Fu, Boyuan Xiao, Xinchen Zhou, Qiufeng Xu, Jiajun Gao, Shuai Zhang, Rui Wang, Cheng Song, Fei Zeng, Weibiao Wang, Feng Pan
Format: Article
Language:English
Published: Nature Publishing Group 2025-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-01007-0
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https://doi.org/10.1038/s41378-025-01007-0

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