Direct optical second harmonic generation probing of manufactured effect at interfaces between high-κ dielectric and silicon
The selection of fabrication method is essential in dielectric layer fabrication of the field-effect transistors. In this study, the second harmonic generation (SHG) signals are observed from the interfaces between high-κ dielectric layers fabricated by different methods and silicon substrate, a pro...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0255449 |
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