Surface structuring of silicon wafers with low-frequency giant pulses YAG:ND laser
Experimental results on the silicon wafers irradiation by a low-frequency giant nanosecond pulses neodymium-doped yttrium-aluminum garnet laser with a wavelength of 1,064 μm are presented. The pulse duration at the half-height was 170 ns, and the pulse repetition frequency was 2 Hz. The experiments...
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| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Tver State University
2024-12-01
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| Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| Subjects: | |
| Online Access: | https://physchemaspects.ru/2024/doi-10-26456-pcascnn-2024-16-738/?lang=en |
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