Surface structuring of silicon wafers with low-frequency giant pulses YAG:ND laser

Experimental results on the silicon wafers irradiation by a low-frequency giant nanosecond pulses neodymium-doped yttrium-aluminum garnet laser with a wavelength of 1,064 μm are presented. The pulse duration at the half-height was 170 ns, and the pulse repetition frequency was 2 Hz. The experiments...

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Bibliographic Details
Main Authors: A.A. Fronya, A.T. Sahakyan
Format: Article
Language:Russian
Published: Tver State University 2024-12-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
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Online Access:https://physchemaspects.ru/2024/doi-10-26456-pcascnn-2024-16-738/?lang=en
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