Evaluation of the Influence of Lorentz Forces on the Natural Frequencies of a Dual-Microcantilever Sensor for Ultralow Mass Detection

Evaluation of the Influence of Lorentz Forces on the Natural Frequencies of a Dual-Microcantilever Sensor for Ultralow Mass Detection

In this paper, the impact of Lorentz forces and temperature on the natural frequencies of a piezoresistive sensor composed of two microcantilevers with integrated U-shaped thin-film aluminum heaters are investigated. Two types of experiments were performed. In the first, the sensor was placed in a m...

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Bibliographic Details
Main Authors: Luca Banchelli, Georgi Todorov, Vladimir Stavrov, Borislav Ganev, Todor Todorov
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Micro
Subjects:
Lorentz force
temperature frequency coefficient (TCF)
dual-microcantilever sensor
natural frequency
vibrations
Online Access:https://www.mdpi.com/2673-8023/4/4/35
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