Effects of electrodeposition current density and additives on the microstructure and mechanical properties of copper films

In CoWoS (Chip on Wafer on Substrate) packages, the mechanical properties face serious problems with decreasing Cu pillar size. In this paper, twinned Cu films were prepared by DC (DirectCurrent) electrodeposition with the addition of MPS (Sodium 3-mercapto-1-propanesulfonate), gelatin and SPS (Sodi...

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Bibliographic Details
Main Authors: Xuefeng Wu, Xiuchen Zhao, Pengrong Lin, Chengwen Tan, Chaoping Wang, Weiwei Chen
Format: Article
Language:English
Published: Elsevier 2025-05-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785425007227
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