Surface modification of aluminum on a silicon chip by citric acid treatment
Aluminum is widely used as a conductive material in the semiconductor and electronics fields. However, the inevitable formation of an oxide layer on its surface during atmospheric heat treatment accompanying the fabrication process increases surface resistivity. This necessitates a surface treatment...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-08-01
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| Series: | Results in Surfaces and Interfaces |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666845925002120 |
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