Tailoring the optical properties of holey Si thin films
Si thin films with holes are composite materials with interesting optical properties that can be fabricated and modified by state-of-the-art Si process technologies. Adjusting the volumetric air fraction of these films allows control over their effective refractive indices. This work demonstrates a...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2024-01-01
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| Series: | Nano Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2632-959X/ad9621 |
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