Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2

Abstract In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐layer deposited MoS2 layers are studied experimentally. The process parameters (laser fluence and the pulse overlap) corresponding to formation of low‐ and high‐spatial frequency LIPSS as well as abl...

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Bibliographic Details
Main Authors: Malte J. M. J. Becher, Jonas B. Ullrich, Julia Jagosz, Aleksander Kostka, Claudia Bock, Andreas Ostendorf, Evgeny L. Gurevich
Format: Article
Language:English
Published: Wiley-VCH 2024-12-01
Series:Advanced Materials Interfaces
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Online Access:https://doi.org/10.1002/admi.202400478
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