Low Loss Quartz Multilayer Substrates and Substrate Integrated Two-Plane Hybrid Couplers Enabled by Copper Direct Bonding
This paper presents a fused silica glass (quartz) multi-layer substrate using the copper direct bonding method. A fabricated substrate-integrated-waveguide (SIW) based two-plane hybrid coupler composed of five quartz layers showed low loss characteristics at the 60 GHz band. Quartz has low loss char...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Journal of Microwaves |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11008625/ |
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