Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization
Abstract The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible, high-performance sensors across fields ranging from medical devices to robotics. Despite advances in fabrication techniques, the development of micro- and nano-scale flexible force sensors with sup...
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| Main Authors: | Ningning Hu, Yucheng Deng, Lujia Ding, Lijun Men, Wenjun Zhang, Ruixue Yin |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-08-01
|
| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00975-7 |
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