Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization

Abstract The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible, high-performance sensors across fields ranging from medical devices to robotics. Despite advances in fabrication techniques, the development of micro- and nano-scale flexible force sensors with sup...

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Bibliographic Details
Main Authors: Ningning Hu, Yucheng Deng, Lujia Ding, Lijun Men, Wenjun Zhang, Ruixue Yin
Format: Article
Language:English
Published: Nature Publishing Group 2025-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-00975-7
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