Research Progress of MEMS Gas Sensors: A Comprehensive Review of Sensing Materials
The MEMS gas sensor is one of the most promising gas sensors nowadays due to its advantage of small size, low power consumption, and easy integration. It has been widely applied in energy components, portable devices, smart living, etc. The performance of the gas sensor is largely determined by the...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/24/8125 |
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