Research on Nanometer Precision Measurement Method of High Order Even Aspheres
Optical aspheres are demanded with extremely high precision to meet functional requirements in space telescopes, extreme ultraviolet lithography, and other modern large optical systems. The nano-precision fabrication of optical aspheres requires high-precision measurements to guide deterministic opt...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/14/21/9969 |
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