Solution of topical spectroradiometric problems using synchrotron radiation
Objectives. In order to solve fundamental metrological problems concerning the reproduction and transmission of spectral radiometry units, as well as developing methods and tools for metrological support of modern technologies such as nanophotolithography in the electronics industry, synchrotron rad...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2022-06-01
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| Series: | Российский технологический журнал |
| Subjects: | |
| Online Access: | https://www.rtj-mirea.ru/jour/article/view/520 |
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