An optomechanical MEMS geophone with a 2.5 ng/Hz1/2 noise floor for oil/gas exploration

Abstract High-precision geophones play crucial roles in terrestrial applications such as oil and gas exploration as well as seismic monitoring. The development of optomechanical precision measurements provides a new design method for geophones, offering higher sensitivity and smaller dimensions comp...

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Bibliographic Details
Main Authors: Shimin Jiao, Ziqiang Qu, Xujin Ma, Hao Ouyang, Wen Xiong, Shaolin Zhang, Qiu Wang, Huafeng Liu
Format: Article
Language:English
Published: Nature Publishing Group 2024-11-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00802-5
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