Technical roadmap of ultra-thin crystalline silicon-based bioelectronics

Technical roadmap of ultra-thin crystalline silicon-based bioelectronics

Ultra-thin crystalline silicon stands as a cornerstone material in the foundation of modern micro and nano electronics. Despite the proliferation of various materials including oxide-based, polymer-based, carbon-based, and two-dimensional (2D) materials, crystal silicon continues to maintain its str...

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Bibliographic Details
Main Authors: Mingyu Sang, Kyubeen Kim, Doohyun J Lee, Young Uk Cho, Jung Woo Lee, Ki Jun Yu
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:International Journal of Extreme Manufacturing
Subjects:
crystalline silicon
oxidation
doping
transfer process
flexible bioelectronics
Online Access:https://doi.org/10.1088/2631-7990/add7a4
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https://doi.org/10.1088/2631-7990/add7a4

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