A 164-dBΩ Transimpedance Amplifier for Monolithic CMOS-MEMS Oscillators in Biosensing Applications
This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacitive-feedback network topology by means of a varact...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2024-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10539601/ |
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| Summary: | This article presents a fully differential tunable high-gain transimpedance amplifier (TIA) conceived as a front-end circuit for monolithic CMOS-MEMS resonators operating in self-sustained oscillation mode. The proposed solution is based on a capacitive-feedback network topology by means of a varactor for gain control. The design is specifically oriented to CMOS-MEMS biosensing applications that require post-CMOS MEMS processing since the adoption of a TIA solution provides robustness against one of such processing steps (i.e., oxygen plasma activation) and a <inline-formula> <tex-math notation="LaTeX">$10\times $ </tex-math></inline-formula> improvement in feedthrough signal elimination compared to a single-ended alternative. The ASIC was fabricated using a 0.35-<inline-formula> <tex-math notation="LaTeX">$\mu $ </tex-math></inline-formula>m commercial CMOS technology from Austria Microsystems featuring a maximum transimpedance gain of 164 dB<inline-formula> <tex-math notation="LaTeX">$\Omega $ </tex-math></inline-formula> with a 10-dB tuning range. It operates at frequencies up to 10 MHz with an input-referred current noise density as low as 13 fA<inline-formula> <tex-math notation="LaTeX">$\cdot $ </tex-math></inline-formula>Hz<inline-formula> <tex-math notation="LaTeX">$^{\mathrm {-1/2}}$ </tex-math></inline-formula> providing an exceptional high-performance sensing. With a 3.3 V supply voltage, it exhibits a 1.6 mW power consumption. The TIA was integrated on-chip with various MEMS resonator topologies, either oriented to volatile organic compounds (VOCs) detection or to microfluidics integration for Lab-on-Chip (LoC) systems, corroborating self-sustained oscillation with a 135-ppb measured Allan deviation and 1.1 V output voltage swing. |
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| ISSN: | 2169-3536 |