A Comparative Analysis of Middle-of-Line Contact Architectures for Complementary FETs
In this paper, we have investigated various middle-of-line contact architectures applied to monolithic complementary FET inverters and have performed a comparative analysis to assess their respective advantages and limitations. For each scheme, we carried out segmentation analysis of resistance and...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10816635/ |
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