Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films
A new technique for measuring Young's modulus of an ultra-thin film, with a thickness in the range of about 10 nm, was developed by combining an optical lever technique for measuring the residual stress and X-ray diffraction for measuring the strain in the film. The new technique was applied to...
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| Format: | Article |
| Language: | English |
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Wiley
2011-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2011/136127 |
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| author | Naoki Yamamoto Hisao Makino Tetsuya Yamamoto |
| author_facet | Naoki Yamamoto Hisao Makino Tetsuya Yamamoto |
| author_sort | Naoki Yamamoto |
| collection | DOAJ |
| description | A new technique for measuring Young's modulus of an ultra-thin film, with a thickness in the range of about 10 nm, was developed by combining an optical lever technique for measuring the residual stress and X-ray diffraction for measuring the strain in the film. The new technique was applied to analyze the mechanical properties of Ga-doped ZnO (GZO) films, that have become the focus of significant attention as a substitute material for indium-tin-oxide transparent electrodes. Young's modulus of the as-deposited GZO films decreased with thickness; the values for 30 nm and 500 nm thick films were 205 GPa and 117 GPa, respectively. The coefficient of linear thermal expansion of the GZO films was measured using the new technique in combination with in-situ residual stress measurement during heat-cycle testing. GZO films with 30–100 nm thickness had a coefficient of linear thermal expansion in the range of 4.3 × 10−6 – 5.6 × 10−6 °C−1. |
| format | Article |
| id | doaj-art-95b509eb31f04105944ed15a6489a682 |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2011-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-95b509eb31f04105944ed15a6489a6822025-02-03T05:53:21ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422011-01-01201110.1155/2011/136127136127Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin FilmsNaoki Yamamoto0Hisao Makino1Tetsuya Yamamoto2Research Institute, Kochi University of Technology, Tosayamada-cho, Kochi 782-8502, JapanResearch Institute, Kochi University of Technology, Tosayamada-cho, Kochi 782-8502, JapanResearch Institute, Kochi University of Technology, Tosayamada-cho, Kochi 782-8502, JapanA new technique for measuring Young's modulus of an ultra-thin film, with a thickness in the range of about 10 nm, was developed by combining an optical lever technique for measuring the residual stress and X-ray diffraction for measuring the strain in the film. The new technique was applied to analyze the mechanical properties of Ga-doped ZnO (GZO) films, that have become the focus of significant attention as a substitute material for indium-tin-oxide transparent electrodes. Young's modulus of the as-deposited GZO films decreased with thickness; the values for 30 nm and 500 nm thick films were 205 GPa and 117 GPa, respectively. The coefficient of linear thermal expansion of the GZO films was measured using the new technique in combination with in-situ residual stress measurement during heat-cycle testing. GZO films with 30–100 nm thickness had a coefficient of linear thermal expansion in the range of 4.3 × 10−6 – 5.6 × 10−6 °C−1.http://dx.doi.org/10.1155/2011/136127 |
| spellingShingle | Naoki Yamamoto Hisao Makino Tetsuya Yamamoto Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films Advances in Materials Science and Engineering |
| title | Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films |
| title_full | Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films |
| title_fullStr | Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films |
| title_full_unstemmed | Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films |
| title_short | Young's Modulus and Coefficient of Linear Thermal Expansion of ZnO Conductive and Transparent Ultra-Thin Films |
| title_sort | young s modulus and coefficient of linear thermal expansion of zno conductive and transparent ultra thin films |
| url | http://dx.doi.org/10.1155/2011/136127 |
| work_keys_str_mv | AT naokiyamamoto youngsmodulusandcoefficientoflinearthermalexpansionofznoconductiveandtransparentultrathinfilms AT hisaomakino youngsmodulusandcoefficientoflinearthermalexpansionofznoconductiveandtransparentultrathinfilms AT tetsuyayamamoto youngsmodulusandcoefficientoflinearthermalexpansionofznoconductiveandtransparentultrathinfilms |