Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility
In this work, a biaxial, piezoelectrically driven resonant MEMS mirror with large design flexibility is presented. After FEM-based design optimization to reduce material stress and thereby maximize the achievable total optical scanning angles, fabricated MEMS mirrors were electrically, mechanically,...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-04-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/139 |
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