Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility

Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility

In this work, a biaxial, piezoelectrically driven resonant MEMS mirror with large design flexibility is presented. After FEM-based design optimization to reduce material stress and thereby maximize the achievable total optical scanning angles, fabricated MEMS mirrors were electrically, mechanically,...

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Bibliographic Details
Main Authors: Lena Wysocki, Patrick Schütt, Jörg Albers, Gunnar Wille, Erdem Yarar, Paul Raschdorf, Lianzhi Wen, Shanshan Gu-Stoppel
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
resonant MEMS mirror
piezoelectric actuation
Lissajous scanning
Online Access:https://www.mdpi.com/2504-3900/97/1/139
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