Ion-induced surface reactions and deposition from Pt(CO)2Cl2 and Pt(CO)2Br2

Ion-induced surface reactions and deposition from Pt(CO)2Cl2 and Pt(CO)2Br2

Ion beam-induced deposition (IBID) using Pt(CO)2Cl2 and Pt(CO)2Br2 as precursors has been studied with ultrahigh-vacuum (UHV) surface science techniques to provide insights into the elementary reaction steps involved in deposition, complemented by analysis of deposits formed under steady-state condi...

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Bibliographic Details
Main Authors: Mohammed K. Abdel-Rahman, Patrick M. Eckhert, Atul Chaudhary, Johnathon M. Johnson, Jo-Chi Yu, Lisa McElwee-White, D. Howard Fairbrother
Format: Article
Language:English
Published: Beilstein-Institut 2024-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
deposition
ion beam
nanostructure
organometallic
precursor
Online Access:https://doi.org/10.3762/bjnano.15.115
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https://doi.org/10.3762/bjnano.15.115

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