Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators

Design method for out-of-plane motion rejecting structure in 2-DoF large stroke actuators

Abstract This paper addresses a critical challenge in the design of MEMS actuators: the rejection of out-of-plane motion, specifically along the Z-axis, which can severely impact the precision and performance of these micro-actuation systems. In many MEMS applications, unwanted out-of-plane displace...

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Bibliographic Details
Main Authors: Wei Bian, Xiaoguang Zhao, Wenshuai Lu, Yijun Yang, Junjie Zhang, Rui You, Fei Xing
Format: Article
Language:English
Published: Nature Publishing Group 2025-07-01
Series:Microsystems & Nanoengineering
Subjects:
MEMS
Actuators
Unwanted Motion Rejecting
Large Stroke
Electromagnetic
Online Access:https://doi.org/10.1038/s41378-025-00971-x
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https://doi.org/10.1038/s41378-025-00971-x

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