Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology

Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology

This paper presents a novel silicon-based piezoresistive pressure sensor composed of a silicon layer with sensing elements and a glass cover for hermetic packaging. Unlike conventional designs, this study employs numerical simulation to analyze the influence of varying roughness levels of the sensit...

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Bibliographic Details
Main Authors: Fengchao Li, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan, Ting Liang
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Micromachines
Subjects:
silicon
piezoresistive
pressure sensor
wet etching
sensitive membrane
Online Access:https://www.mdpi.com/2072-666X/16/5/516
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