Research on the Improvement of Wear Resistance of Si<sub>3</sub>N<sub>4</sub> Substrate by Magnetron Sputtering Deposition of TiN Thin Films with Different Film Structures
In order to solve the problem that the surface of silicon nitride ceramic bearings is susceptible to wear under extreme operating conditions，gradient，multilayer and monolayer TiN films were prepared on silicon nitride substrates using magnetron sputtering.Three nitrogen supply modes were implemented...
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Materials Protection
2025-07-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20250708.pdf |
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