A simulation and experimental study of a valveless piezoelectric micropump based on the synthetic jet principle
A stacked piezoelectric micropump based on the synthetic jet principle with a size of 22 × 22 × 5 mm3 is designed and fabricated. Through theoretical and finite element method (FEM) analysis, the conditions for achieving a synthetic jet structure are obtained, and the gas flow properties inside the...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0034752 |
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