Mechanical impulse enhancement in MEMS using porous silicon combustion process
Nanostructured porous silicon impregnated by solid state oxidants has been studied in order to provide the mechanical impulse for jet-propulsion microsystems. The system with jet-propulsion movement on a silicon chip has been used for impulse measurements. The estimated impulse value is in the range...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/557 |
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