Achieving a large field-induced polarization and energy density in BaTiO3 films sputter-deposited on Si at 200 °C via a buffer-layer technique
Ferroelectric oxide films with a large field-induced polarization can be used in dielectric capacitors for charge or energy storage in microelectronic systems and hence have attracted intense research interest. A high processing temperature is usually required to produce a well-crystallized polar ph...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Tsinghua University Press
2025-03-01
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| Series: | Journal of Advanced Ceramics |
| Subjects: | |
| Online Access: | https://www.sciopen.com/article/10.26599/JAC.2025.9221038 |
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