A D-Band Self-Packaged Low Loss Grounded Coplanar Waveguide to Rectangular Waveguide Transition With Silicon-Based Air Cavity-Backed Structure

A D-Band Self-Packaged Low Loss Grounded Coplanar Waveguide to Rectangular Waveguide Transition With Silicon-Based Air Cavity-Backed Structure

A novel D-band self-packaged silicon-based air cavity-backed transition from grounded coplanar waveguide to air-filled rectangular waveguide was investigated, fabricated, and measured in this work. The equivalent circuit model was established and analyzed in detail, and design procedures are given....

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Bibliographic Details
Main Authors: Zi-Qi Zhang, Xiao-Long Huang, Liang Zhou, Yin-Shan Huang, Cheng-Rui Zhang
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of Microwaves
Subjects:
Benzocyclobutene (BCB)
self-packaged
transition
MEMS
silicon-based
low loss
Online Access:https://ieeexplore.ieee.org/document/10699397/
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https://ieeexplore.ieee.org/document/10699397/

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