Analysis of the Stiffness Characteristic of Three Types of Four-bar Flexure Hinge Mechanism based on ANSYS

The single parallel four-bar flexure hinge mechanism is widely used as the prismatic pair of the ultra-precision stage and precision sensors. Since the ultra-precision stage produces the displacement depended on it,so the stiffness of single parallel four-bar flexure hinge mechanism has a great infl...

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Bibliographic Details
Main Authors: Wang Chengtao, Wang Yuqiao, Yang Xuefeng, Liu Yufei, Wei Huaxian, Sheng Lianchao
Format: Article
Language:zho
Published: Editorial Office of Journal of Mechanical Transmission 2017-01-01
Series:Jixie chuandong
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Online Access:http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2017.05.012
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Summary:The single parallel four-bar flexure hinge mechanism is widely used as the prismatic pair of the ultra-precision stage and precision sensors. Since the ultra-precision stage produces the displacement depended on it,so the stiffness of single parallel four-bar flexure hinge mechanism has a great influence on the positioning accuracy of ultra-precision stage. Aiming at three types of single parallel four-bar flexure hinge mechanisms,the theoretical calculation of stiffness is carried out,then,the mechanisms are analyzed by the finite element software ANSYS 12. 0. The influences of different external dimensions on the stiffness and relationship between stiffness of three types of mechanisms are obtained through comparison and analysis,a reference for their application occasions and the selection in MEMS design is provided.
ISSN:1004-2539