Defect Studies in Thin-Film SiO<sub>2</sub> of a Metal-Oxide-Silicon Capacitor Using Drift-Assisted Positron Annihilation Lifetime Spectroscopy

Defect Studies in Thin-Film SiO<sub>2</sub> of a Metal-Oxide-Silicon Capacitor Using Drift-Assisted Positron Annihilation Lifetime Spectroscopy

This work investigates the impact of an internal electric field on the annihilation characteristics of positrons implanted in a <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>180</mn><m...

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Bibliographic Details
Main Authors: Ricardo Helm, Werner Egger, Catherine Corbel, Peter Sperr, Maik Butterling, Andreas Wagner, Maciej Oskar Liedke, Johannes Mitteneder, Michael Mayerhofer, Kangho Lee, Georg S. Duesberg, Günther Dollinger, Marcel Dickmann
Format: Article
Language:English
Published: MDPI AG 2025-07-01
Series:Nanomaterials
Subjects:
drift-enhanced positron annihilation lifetime spectroscopy
thin-films
interface defects
positronium formation
positron drift
Online Access:https://www.mdpi.com/2079-4991/15/15/1142
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