Integrating Multiple Hierarchical Parameters to Achieve the Self-Compensation of Scale Factor in a Micro-Electromechanical System Gyroscope

Integrating Multiple Hierarchical Parameters to Achieve the Self-Compensation of Scale Factor in a Micro-Electromechanical System Gyroscope

The scale factor of thermal sensitivity serves as a crucial performance metric for micro-electromechanical system (MEMS) gyroscopes, and is commonly employed to assess the temperature stability of inertial sensors. To improve the temperature stability of the scale factor of MEMS gyroscopes, a self-c...

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Bibliographic Details
Main Authors: Rui Zhou, Rang Cui, Daren An, Chong Shen, Yu Bai, Huiliang Cao
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Micromachines
Subjects:
MEMS gyroscope
scale factor
PLSR
temperature stability
self-compensation
Online Access:https://www.mdpi.com/2072-666X/15/11/1385
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